Tiêu chuẩn quốc tế
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Số hiệu
Standard Number
ASTM F1398-93(2005)
Năm ban hành 2005
Publication date
Tình trạng
W - Hết hiệu lực
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Tên tiếng Anh
Title in English Standard Test Method for Determination of Total Hydrocarbon Contribution by Gas Distribution System Components
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Chỉ số phân loại Quốc tế (ICS)
By field |
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Số trang
Page 10
Giá:
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Phạm vi áp dụng
Scope of standard 1.1 This test method covers the testing of components for total hydrocarbons (THC) contribution to a gas distribution system at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C. 1.2 This test method applies to in-line components containing electronics grade materials in the gaseous form, such as those used in semiconductor gas distribution systems. 1.3 Limitations: 1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for components larger than 12.7-mm ( 1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample. 1.3.2 Different instrumental methods (such as flame ionization detector (FID), mass spectrometer (MS)) will yield total hydrocarbon (THC) levels that are not comparable due to different sensitivities to different molecular species. Hydrocarbon contaminants of high-purity gas distribution systems can be subdivided into two general categories: (1) noncondensable hydrocarbons (
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