Tiêu chuẩn quốc tế

• Số hiệu / Standard Number: ASTM F671
• Năm ban hành / Publication date: 1999
• Tình trạng / Status: W - Hết hiệu lực
• Tên tiếng Anh / Title in English: Standard Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials
• Chỉ số phân loại Quốc tế (ICS) / By field: 29.045 - Vật liệu bán dẫn
• Số trang / Page: 4

Phạm vi áp dụng / Scope of standard

1. Scope

1.1 This test method covers techniques for determination of the length of the flatted portion of a wafer periphery.

1.2 This test method is intended primarily for use on electronic materials in the form of nominally circular edge-contoured wafers with flat lengths up to 65 mm. The precision of this test method has been established directly only for silicon wafers, but it is not expected to be material dependent.

1.3 This test method is suitable for referee measurement purposes and may be used for routine acceptance measurements when specified limits require test precision greater than can be obtained with hand held scale and unaided eye.

1.4 This test method is independent of surface finish.

1.5 For application to wafers of diameter 3 in. or smaller, the values stated in inch-pound units are to be regarded as the standard; the values stated in acceptable metric units are for information only. For application to wafers of diameter larger than 3 in., the values stated in acceptable metric units are to be regarded as the standard whether or not they appear in parentheses; the values stated in inch-pound units are for information only.

NOTE 1--DIN 50441, Part 4, is a similar, but not equivalent method for determining flat length. In this method the flat length is calculated from a measurement of a flat depth. This method does not provide any correction for rounding at the ends of the flat.

1.6 This standard does not purport to address the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.