Tiêu chuẩn quốc tế
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Số hiệu
Standard Number
EN 60204-33:2011
Năm ban hành 2011
Publication date
Tình trạng
A - Còn hiệu lực
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Tên tiếng Anh
Title in English Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipmentIEC 60204-33:2009 (Modified)
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Giá:
Price Liên hệ / Contact us
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Phạm vi áp dụng
Scope of standard This part of IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
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